Agilent ICP-MS MassHunter software provides instrument control and data analysis (DA) for Agilent ICP-MS and ICP-QQQ systems. The latest revision of ICP-MS MassHunter, version 5.4, was released in June 2025. It supports all current Agilent 7850 and 7900 single quadrupole ICP-MS and Agilent 8900 ICP-QQQ systems and remains compatible with the Agilent 7800 ICP-MS and 8800 ICP-QQQ platforms.

ICP-MS MassHunter 5.4 is compatible with Windows 11, enabling laboratories to transition smoothly in preparation for the end of Windows 10 support. It also integrates with compliance solutions such as Agilent OpenLab Server/ECM XT 2.7/2.8 and ECM 3.6.

This version of the software introduces a new workflow for high-purity semiconductor reagents, significant enhancements to single nanoparticle (sNP) analysis, and support for dry pumps, custom racks for the Agilent SPS 4 autosampler, and integration with the SEMI E30 Software Development Kit. These developments are designed to address the evolving needs of semiconductor and advanced materials laboratories.

New features in ICP-MS MassHunter 5.4

ICP-MS MassHunter version 5.4 builds on the new, simplified user interface introduced in version 5.1, with a host of enhancements and new functions, including:

Simple Recipe: A new workflow for high-purity reagents

The new version of software introduces a new workflow called “Simple Recipe”, which includes a series of preset methods that simplify trace element analysis of high-purity reagents (Figure 1). The recipes are especially useful for inexperienced operators. Recipes are included for UPW, H?O?, HNO?, HCl, H?SO?, and IPA. Each recipe enables automatic optimization of plasma conditions during startup and autotune, including warm/cool plasma settings. A dedicated Fast-AutoTune routine completes in under eight minutes and achieves a BEC < 1 ppt for most elements. The workflow is supported by a comprehensive SOP that guides users from sample preparation to data acquisition, helping to reduce variability and training requirements. Batches created with Simple Recipe can also be converted to Custom Tune for full manual optimization when needed.

A software interface displaying a detailed configuration screen with task navigation on the left and a settings window in the center. Various data fields and options for gas flow and sampling types are visible, indicating equipment configuration for scientific analysis. The layout is structured and technical, conveying a professional, analytical tone.

Figure 1. Example of the Simple Recipe user interface with preset method selection.

Enhanced Single Nanoparticle (sNP) analysis

ICP-MS MassHunter 5.4 introduces significant enhancements to the single nanoparticle (sNP) analysis module. A redesigned interface allows users to configure and review multi-element sNP data in a single view, similar to FullQuant workflows (Figure 2). New algorithms support Gaussian fitting for particle signal detection, accounting for particle aggregation in reference materials. They also enable outlier detection based on relative standard deviation (RSD) criteria. Users can now select from a broader range of units for particle, mass, and ionic concentrations. Enhanced visualization tools also allow simultaneous display of up to six elements, along with customizable particle-size charts.

Modern laboratory setup featuring advanced analytical equipment, including an ion chromatograph, autosampler, ICP-MS, and computer monitor on a counter.

Figure 2. Interface of a data analysis software displaying sample data in tables and graphs. Includes particle and signal size distribution charts, suggesting scientific analysis.

Other enhancements in ICP-MS MassHunter version 5.4 include:

 
  • Improvements to the Agilent ADS 2 system, including lower sample consumption options, automatic blank insertion following the analysis of over-range samples, and PDF-format system test reports
  • Early maintenance feedback (EMF) tracking of the dry pump
  • Option to define and replicate non-standard rack configurations for the SPS 4 autosampler (Figure 3)
  • Support for SEMI E30 Software Development Kit integration, enabling communication with semiconductor manufacturing equipment using GEM/SECS-II protocols
Custom rack editor interface showing a rack layout with various grey geometric shapes representing custom bottles in an 8x3 grid. Settings for vial shape and size are on the right.

Figure 3. Custom Rack configuration tool for the Agilent SPS 4 autosampler.

More information at: Agilent ICP-MS software | Agilent

As well as the ICP-MS mainframes already listed in the article, ICP-MS MassHunter 5.4 is compatible with:

  • Windows 11 Pro or Enterprise (64 bit) v.23H2 and 24H2
  • Microsoft Excel. Although ICP-MS MassHunter does not require Excel, it is fully compatible with Microsoft 365 Excel (on-premise) and 64-bit Excel 2024. 32-bit Excel 2021 is also supported.
  • Agilent and third-party* autosamplers and accessories (*Requires a plug-in from the accessory supplier).
  • Agilent 7890 and 8890 GC and 7693 autosampler. Requires the optional chromatographic software module.
  • Most Agilent 1100 and 1200 Series HPLC modules and peripherals. Requires the optional chromatographic software module.
  • Agilent compliance software, Workstation Plus, OpenLab Basic Server/OpenLab Server, and ECM XT 2.7/2.8, ECM 3.6.

Access a summary of the study here.

DE-008356